Abstract
The oxidation of YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films with purified ozone has been studied by in-situ resistivity measurements during annealing, and the oxidizing activity of ozone was compared with that of molecular oxygen. The experimental results suggest that ozone partial pressure, which yields the YBa/sub 2/Cu/sub 3/O/sub 7-x/ phase with a certain oxygen content, is about 5 orders of magnitude smaller than the pressure of molecular oxygen which yields the same oxygen content of YBa/sub 2/Cu/sub 3/O/sub 7-x/. The pressure-temperature phase diagram in ozone was also generated from these results. The YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin film with a superconducting transition temperature of 86 K was deposited at an ozone pressure of 9*10/sup -5/ Torr.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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