Abstract
This paper reports the fabrication and the characterisation of a NDIR sensor based on a micro-bolometer detector and a MEMS IR-source. The accuracy and repeatability of the sensor was studied for CO2 and hydrocarbons detection. The results show that the performances obtained are totally compatible with indoor air quality requirements. Moreover the sensor has a very low power consumption (in the order of 1mJ per measurement), which makes it suitable for autonomous applications. Finally, we emphasise the fact that this sensor, because it uses a bolometer array, can be converted in a multi-gas sensor.
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