Abstract
Planar optical waveguides have been formed in SIMOX structures, and the effect of the thickness of the buried oxide layer on propagation loss hs been studied. Waveguides with a guiding layer thickness of approximately 6 mu m have been measured, and the lowest loss, which is on the order of that of pure silicon, was observed for a buried oxide thickness of 0.4 mu m, at a measurement wavelength of 1.523 mu m. >
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