Low-loss lateral-extensional piezoelectric filters on ultrananocrystalline diamond

Abstract

In this work, lateral-extensional thin-film piezoelectric- on-diamond (TPoD) filters with very low insertion loss (IL) values (<4 dB) are reported. Two different lateral-extensional modes of a resonant structure are coupled together to realize a two-pole filter. The filters of this work exhibit low IL values, with fractional bandwidth between 0.08% and 0.2%, and have a very small footprint. This paper reports on the lowest IL in the literature for lateral-extensional thin-film piezoelectric filters with 50 Ω terminations in the GSM frequency band (~900 MHz). The narrow-band filters of this work are fabricated on three ultrananocrystalline diamond substrates to achieve higher frequencies without excessive reduction in the feature size. The paper also thoroughly studies the parameters that affect the performance of such filters and then discussions are evaluated by the statistical data collected from the fabricated wafers.