Abstract

Two techniques are proposed to obtain low-loss high-power static induction thyristors (SIThys). A dual-sided proton-irradiation technique and a technique that combines anode shorting and proton irradiation both provide n-channel and p-channel SIThys with high blocking voltages and a good trade-off between switching times and forward voltage drops. In particular, dual-sided proton irradiation provides a SIThy with forward and reverse blocking voltage higher than 1 kV. An n-channel SIThy with an n-region thickness of 230 mu m has shown a rise time of 0.24 mu s, a storage time of 0.19 mu s, a fall time of 0.08 mu s, and a forward voltage drop of 3.0 V at an anode current of 50 A (125 A/cm/sup 2/). The effect of the combined technique is much the same as that of the dual-sided proton irradiation. Using the dual-sided proton irradiation, a p-channel SIThy with a p-region thickness of 430 mu m has shown a rise time of 0.5 mu s, a storage time of 0.1 mu s, a fall time of 0.3 mu s, and a forward voltage drop of 6.0 V at an anode current of 4 A (110 A/cm/sup 2/). Using the proposed techniques, a complementary high-power control circuit with low loss and switching frequency higher than a few hundred kilohertz can be realized.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>

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