Abstract
In this study, we develop a multi-physics-based simulation model for 2D-based MEMS microphone to predict and characterize its performance. The 2D material is comprised of MoS2 which is a novel substance that is predicted to revolutionize many areas of energy-related fields. Here, we apply the 2D material to the next-generation MEMS (Micro Electro Mechanical Systems) microphone. We present a model in which various parameters can be controlled and output performance is predicted. The effects of membrane size, shape, and number of layers, along with the electrode location, vent-hole size, shape, and number, on the acoustic performance of the microphone are investigated. In addition, we explore the potential low-frequency performance enhancement of the miniature microphone using acoustic metamaterial.
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