Abstract
Dense and chevronic thin films of parylene C were fabricated using a physicochemical vapor deposition technique and their dielectric functions were measured as functions of frequency (from 0.1Hz to 0.1MHz) and temperature (from −140°C to 260°C) using an impedance meter. The real part of the dielectric function of the chevronic thin film was considerably higher than that of its dense counterpart. Higher dielectric strength, loss factor and conductivity for the chevronic parylene suggest an amorphous phase which are more present in this semi-crystalline polymer. X-ray diffractions are now envisaged to confirm this assumption.
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