Abstract
A method for measurement of ultra-low flying height in head-disk spacing is described. Three different wavelengths are selected out from white light by filters to measure the spacing simultaneously.Besides solving the ambiguity problem,a more reliable result is achieved by using weighted average of measurement results from three different wavelengths,where the weight is dependent upon spacing.Fringe-bunching correction algorithm(FBC)and spot-tilling technique are adopted to suppress calibration and random errors.Moreover,incident bandwidth correction(IBC) method is introduced to compensate the error caused by low monochromaticity of incident light. Based on dynamic flying height tester(DFHTⅡ),with the redesigned of photo-electric conversion and signal acquirement module,an instrument has been developed.And comparing the experimental data from the instrument with those from a KLA-FHT D6,the discrepancy is less than 5%.It indicates that the instrument is suitable to perform ultra-low flying height measurement and satisfies the requirement of magnetic heads manufacturing.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Chinese Journal of Mechanical Engineering (English Edition)
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
