Low energy ion implantation simulation using a modified binary collision approximation code

Abstract

We have developed a modified version of the binary collision approximation code MARLOWE with the aim of accurately predict the implanted dopant profiles, even in the low energy case. In our simulations, instead of using the asymptotic path of the projectile, the path of the colliding particles is carefully evaluated for each collision. In order to avoid the computation time penalty of such calculation, the data of the outgoing particles is tabulated previously for a large set of collision events, and an interpolation is done during the main Monte Carlo simulation. The simulated profiles show a better agreement with the experimental data for low energy implants, while the accuracy for the high energy implants is maintained.