Abstract

Abstract Argon ion transport through a beam defining aperture has been investigated at energies between 0.1 and 15 keV. It was found that the current which can be fed through the aperture depends strongly upon the operation parameters of the ion source. For optimum source performance the maximum current transmitted is limited by space charge expansion of the beam. This interpretation of the experimental results is supported by simple calculations. The measurements additionally provide information about the plasma potential.

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