Abstract
Low energy electrons irradiation represent an alternative method for the chemical and thermal treatments used in the elimination of sp3 hybridization of carbon thin films and restoring the sp2 structures. The procedure significantly reduces the added chemical groups mainly hydroxyl ones presented in alcohols, on the surfaces of the carbon deposited thin films. Irradiation induces a graphitization process of deposited carbon thin films revealed by the x-ray diffraction, x-ray photoelectrons spectroscopy, Raman spectroscopy and sheet resistance measurements which demonstrate a gradual elimination of the add-on chemical groups together with the increasing of electrical conductivity in these carbon films.
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