Abstract

The electron inelastic mean free path (IMFP) is an important quantity for electron spectroscopy and microscopy techniques. At present, there are very few data of IMFPs for two-dimensional (2D) materials. Here, we determine the IMFP at energies below 100 eV for monolayer graphene both experimentally and theoretically. The experimental determination is based on a data-driven spectral analysis technique, including the virtual substrate method and the reverse Monte Carlo method. The theoretical determination is performed within the dielectric formalism, using the energy-loss function calculated in the time-dependent density functional theory. The experimental and theoretical results show that the IMFP for monolayer graphene is almost constant (about 1 nm) in the energy range of 6–100 eV. This study suggests a general and reliable approach to determine low-energy IMFPs for 2D materials.

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