Low-Energy Electron Diffraction and X-Ray Photoelectron Spectroscopy Studies of Sb-induced Reconstruction on Si(113)3×2 Surface

Abstract

We investigated Sb-induced reconstruction on a Si(113)3×2 surface using low-energy electron diffraction (LEED) and X-ray photoelectron spectroscopy (XPS). Depending on the annealing temperature and Sb coverage, 1×1, 1×2+2×, 2×2, and 2×5 structures were observed. The 2×2 and 2×5 structures showed reversible phase transitions to 1×2 and 1×5 structures respectively at high temperature. The relative Sb coverages of the 1×1 and 2×2 structures formed by annealing at about 400 and 700°C were measured from Sb 3d/Si 2p core-level XPS intensity ratios.