Low energy (E 0 < 10 keV) atom and ion scattering of neon from a Cu(100) surface; Ionization and neutralization

Abstract

The ion fractions η + of low energy (5–10 keV) neon particles scattered from a Cu(100) surface are measured with a time of flight spectrometer. These fractions are obtained for neutral as well as charged projectiles and for different crystal directions. The scattering angle θ was 30°. For a primary energy E 0 of 5 keV neutral projectiles have a value for η + which is 30 times lower than for charged projectiles; these values are 0.15 and 4.5% respectively. For E 0 = 10 keV the values of η + are about the same (~22%). Energy differences up to 22 eV, depending on E 0, are observed between the single scattering peaks in the ion spectra of charged and neutral projectiles but also between the single scattering peak in the spectra of all scattered particles and of ions, with ions as projectiles. A qualitative discussion of these data is given, involving charge transfer processes of noble gas particle and target atom. The data suggest that these neutralization processes can be described more adequately with interatomic neutralization processes along the trajectory than with Auger neutralization by conduction electrons.