Abstract
Semiconductor gas sensors still have limitations in realizing rapid hydrogen measurement in lower hydrogen concentration environments. Therefore, in this paper, In2O3 cloud-like spherical hydrogen detection sensing materials with different Pd and Pt ratio loading were successfully prepared using the water bath method. The In2O3 sensing materials modified with noble metals Pd and Pt were designed for the rapid detection of hydrogen at 400 ppb with good selectivity under mixed gas components. The crystalline phase, morphology, and chemical composition of the prepared Pd and Pt-loaded In2O3 samples were analyzed using characterization techniques. The gas-sensing results showed that the In2O3 gas-sensing sensor with a Pd and Pt ratio loading of 1–2 had stronger H2 sensing performance at the optimum operating temperature (350°C). The response time and recovery time of In2O3 loaded with the opinion ratio at 350℃ and 400 ppb were 1 s and 15 s. The low detection limit was 400 ppb, with good repeatability and long-term stability. Finally, the enhanced gas sensitization mechanism of the In2O3 gas sensor loaded with Pd and Pt for H2 was discussed.
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