Abstract
A grating dry-etched through the upper wells of a multiquantum-well active layer has been characterized before and after regrowth. TEM observation and carrier lifetime measurements have shown growth-free defects of the epitaxial layers. As a consequence, quasi-100% monomode oscillation on /spl lambda/+1 mode has been achieved on complex-coupled distributed-feedback GaInAsP QW lasers fabricated with such grating.
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