Abstract

Patterned conformal conductive structures are used to realize flexible electronics for applications such as electronic skin, communication devices, and sensors. Thus, there is a demand for low-cost rapid fabrication techniques for flexible and stretchable conductors. Spray-coating of liquid metals is a prototyping method that is compatible with elastic substrates. In this work, UV-curable and polyimide masks were used to pattern sprayed liquid metal (LM). The effect of the spraying parameters on the thickness and conductivity of the LM was characterized. A minimum LM linewidth of 48 µm was achieved, along with a minimum gap width of 34 µm. A LM patch antenna and transmission line, which can potentially be used for communication systems, were demonstrated using this fabrication process.

Highlights

  • Patterning conformal structures on flexible and stretchable substrates have many applications, such as flexible and stretchable sensors, antennas, or electronic skin

  • Spraying conductive inks have been used in flexible sensors and RF devices for various applications, such as a stretchable RF antenna [6], radio-frequency identification (RFID) antenna [7], optical antenna [8], strain sensors [8], sensors on skin [9,10], and wearable electronics [11]

  • Using a shadow mask to pattern sprayed Galinstan [14] resulted in a minimum line width of 500 μm, but the micromachined mask increased the cost of the fabrication process

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Summary

Introduction

Patterning conformal structures on flexible and stretchable substrates have many applications, such as flexible and stretchable sensors, antennas, or electronic skin. The implementation techniques of such devices should be done with flexible and stretchable materials [1,2,3,4,5] that are optimally compatible with low-cost rapid prototyping. Many low-cost rapid prototyping fabrication techniques have been developed to realize flexible RF devices. Spraying conductive inks have been used in flexible sensors and RF devices for various applications, such as a stretchable RF antenna [6], radio-frequency identification (RFID) antenna [7], optical antenna [8], strain sensors [8], sensors on skin [9,10], and wearable electronics [11]. Using a shadow mask to pattern sprayed Galinstan [14] resulted in a minimum line width of 500 μm, but the micromachined mask increased the cost of the fabrication process. A vinyl mask for rapid prototyping was limited to line structures with a minimum width of 200 μm [15]

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