Low-Cost Plate-Type MOEMS Uniaxial Vibration Sensor Based on Metal Etching and Fiber Collimator Technique

Abstract

In order to give full play the unique advantage of micro-opto-eclectro-mechanical system (MOEMS) sensor, one novel low-cost plate-type MOEMS uniaxial vibration sensor based on metal etching and fiber collimator technique is proposed and studied in this paper. Core vibration element of the MOEMS vibration sensor is fabricated by the metal etching technique, and its fiber collimator instrument is made up by ultra-polished ceramic ferrule and plane fiber flange. All these techniques can reduce the fabrication cost of the MOEMS vibration sensor greatly. A theory calculation model of the MOEMS vibration sensor is established and further verified by simulation experiments. The first-order resonant frequency of the MOEMS vibration sensor obtained from the simulation experiment is 1536 Hz. Lower resonant frequency confirms that the MOEMS vibration senor can achieve high-precision acceleration measurement theoretically. Limited by detection frequency range of the reference sensor, amplitude calibration experiment of fixed frequency (500 Hz) is carried out and experiment results prove the excellent performance of the MOEMS vibration sensor.