Abstract
A concept for the fabrication of low cost resonant scanning mirrors using standard microstructure technology is proposed. To demonstrate the process a mirror device for a head mounted display system was designed and fabricated. The mirror was successfully actuated using a post-mounted piezoelectric device. The monolithic design provides potential for extremely low cost replicated devices. We argue that microstructure technology can also benefit the production of relatively large scale devices.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
