Abstract
We describe a low-cost method of fabricating optical patterns in a hybrid sol-gel glass on curved surfaces by means of soft lithography. The ion etching step, which is presently difficult to realize on curved surfaces, is avoided in this process. Using the proposed soft lithography technique, it is possible to transfer high-quality patterns to a hybrid sol-gel glass on curved surfaces. This technique offers a low-cost and simple method for obtaining optical glass structures on such surfaces. The use of a sol-gel glass (replacing an epoxy) layer greatly prolongs the life of replica gratings, especially in the vacuum ultraviolet applications.
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