Low‐cost Integrated Silicon Sensors for Industrial Applications

Abstract

Silicon sensors are semiconductor devices which transform a physical effect (such as pressure, acceleration, flux) into electrical effects (resistance, capacitance variation). Fabrication of these silicon sensors requires very precise control of the silicon micromachining. Some silicon foundries have adapted their experience in integrated circuit manufacturing to silicon sensor production and thus have reduced the costs and dimensions of the silicon sensors. Standard thick film technology has brought versatility to silicon sensor technology. Silicon sensors mounted on a ceramic substrate give fast development, high performance and low cost to OEMs. An alternative solution is the integrated silicon sensor including sensor and circuitry on the same silicon chip. This has been developed for specific applications.