Abstract
ABSTRACTUsing a novel low-temperature process, we demonstrate the facile integration of crack-free nanostructured titania (NST) as sensing elements in microsystems. Unlike conventional sol-gel methods, NST layers of interconnected nano-walls and nano-wires were formed by reacting Ti surfaces with aqueous hydrogen peroxide solution. Cracks were observed in NST layers formed on blanket Ti films but absent on arrays of patterned Ti pads below a threshold dimension. Analyses using TEM, high resolution SEM, X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) reveal that NST consists of anatase TiO2 nano-crystals. NST pads were found able to detect oxygen gas of a few ppm. NST pad arrays were integrated on rigid and flexible substrates with potential applications in low cost and wearable sensing systems.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
