Abstract
A low cost, compact-extrinsic Fabry–Perot interferometer (EFPI) based on a polyethylene diaphragm for vibration detection is proposed. A fiber optic Fabry–Perot accelerometer (FOFPA) with a diameter of 10.0 mm is fabricated and a silica gel is adhered to the middle of polyethylene diaphragm as a mass load to form a compact structure. Theoretical simulation, modal analysis, and experimental tests are carried out to evaluate the performance of this FOFPA. Experimental results show that the measured sensitivity and acceleration resolution are 135 mV/g and 24.4 μg/Hz1∕2, respectively. The sensor has a flat frequency response in the range of 20 Hz–1.5 kHz and is expected to be used for micro vibration monitoring.
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