Abstract
In this paper, the development of a low cost 4-channel coarse wavelength division multiplexer (CWDM) splitter is reported. The CWDM splitter consists of 3 thin film filters (TFF), 4 high reflection micro-mirrors (MM) and 4 ball lenses (BL) which are all assembled on a silicon optical bench (SiOB). The configuration of the CWDM splitter is modeled in three dimensional space by using commercial optical design software ASAP. The MMs are obtained by metal deposition on silicon wafer and dicing technology. The SiOB is fabricated by applying microelectromechanical system (MEMS) technology including wet anisotropic etch and dry deep reactive ion etching (DRIE) anisotropic etch processes. Finally the individual optical components are assembled and experimentally tested by employing optical spectrum analyzer (OSA) as multi-channel receiver for CWDM applications. The prototype showed a cumulative loss of 5.8 dB for the first channel due to the alignment tolerance. The bandwidth of individual channel is about 21.8 nm at 30 dB.
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