Abstract
PMMA/ZnO/glass structure was investigated to enhance Love mode sensor sentivities. The phase velocities and the attenuation of the acoustic wave propagating along the PMMA/30° tilted c-axis ZnO/glass structure contacting a viscous non-conductive liquid were calculated for different PMMA (Polymethyl methacrylate) and ZnO guiding layer thicknesses, added mass thicknesses, and liquid viscosity and density. The sensor velocity and attenuation sensitivities were also calculated for different environmental parameters. The resulted sensitivities to liquid viscosity and added mass were optimized by adjusting the ZnO and PMMA guiding layer thickness corresponding to a sensitivity peak. The present analysis is of importance in manufacturing and applications of the PMMA-ZnO-glass structure Love wave sensors for the detection of liquids properties, such as viscosity, density and mass anchored to the sensor surface.
Highlights
The propagation of Love modes along 30° tilted c-axis ZnO/glass-based structures has been modeled and analysed aimed to the design of a sensor able to operate in liquid environment [1]
The sensor velocity and attenuation sensitivities to the changes of liquid viscosity and mass loading were calculated for different ZnO layer thicknesses and the peak sensitivity was achieved at the ZnO
The theoretical sensitivity of Love wave sensors, based on PMMA/ZnO/Glass structure, to the properties of a liquid environment, and to a mass deposited from a viscous Newtonian liquid phase is derived
Summary
The propagation of Love modes along 30° tilted c-axis ZnO/glass-based structures has been modeled and analysed aimed to the design of a sensor able to operate in liquid environment [1]. The higher ratio of shear wave velocity, or density, or both between substrate and the guiding layer material, the higher the maximum sensitivity [2]. Polymer material such as polymethyl-methacrylate (PMMA) has been used for Love wave guiding layer due to its low mass density and shear velocity [3]. It has high acoustic damping loss due to viscoelastic properties of PMMA. SiO2 and PMMA as double guiding layer with Quartz piezoelectric substrate They achieved the highest mass loading sensitivity of 52 m2·kg−1, which is higher than SiO2 (38 m2·kg−1) and PMMA 2. Love Wave Sensors in PMMA-ZnO-Glass Layered Structures for Application in Liquid. To account viscoelastic properties of PMMA as guiding layer 2, it has complex shear modulus and complex shear velocity
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