One platform for all researcher needs
AI-powered academic writing assistant
Your #1 AI companion for literature search
AI tool for graphics, illustrations, and artwork
Unlock unlimited use of all AI tools with the Editage All Access membership.
Explore Editage All Access
Search from 250 M+ research papersSearch from 250 M+ research papershttps://doi.org/10.1143/jjap.38.4373
Copy DOI Journal: Japanese Journal of Applied Physics |  Publication Date: Jul 1, 1999 |
 Citations: 7 |
Affiliation: Nagoya UniversityLoss Processes of F Atoms in Low-Pressure, High-Density CF4 Plasmas with the Admixture of H2
Sign-in/Register to access full text options 
Free) Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
