Abstract
In recent decades, literatures about visible vertical cavity surface emitting lasers (VCSELs) have been reported. However, due to high optical loss in the cavity, lasing from deep ultraviolet (DUV) VCSEL was still rarely achieved. The optical loss in nitride DUV microcavity was analyzed in detail. DUV nitride vertical Fabry–Perot microcavity with active layer of AlGaN-based quantum dots and double-side HfO2 / SiO2 distributed bragger reflectors was fabricated. Optical losses with of the order of 103 cm − 1 were deduced from the Q value of the cavity modes. The main origination of optical loss in DUV cavity was calculated and ascribed to the interface scattering. The interface roughness appearing after laser lift-off process and overlap between rough interface and standing optical wave were two key parameters that contributed to interface scattering loss. We believe that our results will provide useful information for improving DUV VCSEL devices.
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