Abstract

Long-wavelength InGaAlAs-InP vertical-cavity surface-emitting lasers (LW-VCSELs) covering the wavelength range from 1.3 to 2.3 µm are presented. Furthermore, these lasers can be fabricated in a novel high-speed design-reducing parasitics to enable bandwidths in excess of 11 GHz at 1.55 µm. To the best of the authors' knowledge, this is the fastest 1.55 µm VCSEL ever presented. As a proof-of-concept one- and two-dimensional arrays have been fabricated with high yield. All devices use a buried tunnel junction for current confinement and a dielectric backside reflector with integrated electroplated gold-heatsink. This concept enables CW operation at room temperature with typical single-mode output powers above 1 mW. Both, wavelength range and modulation performance, together with VCSEL features such as operation voltage around 1 V and power consumption as low as 10–20 mW enable applications in tunable diode laser spectroscopy (TDLS) and optical data transmission. Error-free data transmission at 10 Gbit/s over 22 km which can be readily applied in uncooled coarse wavelength division multiplex passive optical networks is presented. A laser hygrometer using a 1.84 µm VCSEL demonstrates the functionality of TDLS systems with VCSELs.

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