Abstract
An example of a multilayer component for 248-nm excimer laser applications is explained in this contribution. By means of a polarizing beam splitter the potential of plasma- assisted deposition is shown. Such a coating shows a high reflecting and a high transmitting function for different polarization at a certain angle of incidence. High reflection requires a considerable number of layer pairs with a large total optical film thickness. Despite large film thickness, the optical absorption can be minimized and high transmission can be obtained. The laser induced damage threshold of such a coating is in the order of 2.5 J/cm2 for single shot measurements at 20 ns pulse length. The life time is greater than 5X109 shots at a fluence of 10mJ/cm2. Very stable deposition conditions must be maintained to produce these coatings within small tolerance of the optical function. It was found that plasma-assisted deposition is a more reliable technology for producing these coatings compared to classical evaporation.
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