Abstract

We present high-performance integrated optical phased arrays along with first-of-their-kind light detection and ranging (LiDAR) and free-space data communication demonstrators. First, record-performance optical phased array components are shown with low-power phase shifters and high-directionality waveguide grating antennas. Then, one-dimensional (1-D) 512-element optical phased arrays are demonstrated with record low-power operation ( $ 1 mW total), large steering ranges, and high-speed two-dimensional (2-D) beam steering ( $ 30 $\mu$ s phase shifter time constant). Next, by utilizing optical phased arrays, we show coherent 2-D solid-state LiDAR on diffusive targets with simultaneous velocity extraction at a range of nearly 200 m. In addition, the first demonstration of 3-D coherent LiDAR with optical phased arrays is presented with raster-scanning arrays. Finally, lens-free chip-to-chip free-space optical communication links up to 50 m are shown, including a demonstration of a steerable transmitter to multiple optical phased array receivers at a 1 Gb/s data rate. This paper shows the most advanced silicon photonics solid-state beam steering to date with relevant demonstrators in practical applications.

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