Abstract
The high-phase velocity (above 6100 m/s in an aluminum (Al) grating on lithium niobate (LiNbOs)) of the longitudinal leaky surface acoustic wave (SAW) (LLSAW) mode makes it attractive for application in high-frequency SAW ladder filters in the 2-5 GHz range. We investigate the dependence of one-port synchronous LLSAW resonator performance on YZ-LiNbO3 on the metallization thickness and metallization ratio, both experimentally and theoretically. Our results indicate a strong dependence of the Q factor and resonance frequency on the aluminum thickness, with the optimal thickness that produces the highest Q values being about 8%. The optimal thickness increases with the metallization ratio. The observed behavior is interpreted with the help of simulations using a combined finite element method (FEM)/boundary element method (BEM) technique. As an application, bandpass filters have been fabricated in the 2.8 GHz frequency regime, based on LLSAWs. The synchronous resonators constituting the ladder filters operate in the fundamental mode. The filters feature low insertion losses below 3 dB and wide relative passbands of 4.5-5%.
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