Abstract
Utilization of ballistic focusing in the longitudinal Hall-type ion source is described. It allows transformation of the ion beam shape from an “ellipsoidal” one to a linear one, as well as increasing the ion beam current density per the operating surface. Both the influence of transverse magnetic field and edge effects on the beam shape are investigated. The ion beam is charge compensated by a plasma neutralizer designed on the basis of a supplementary semi-self-maintained magnetron-type discharge and hollow cathode effect.
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