Long Wavelength-Tunable VCSELs With Optimized MEMS Bridge Tuning Structure

Abstract

In this letter, we present the first demonstration of a long wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) using a monolithically integrated bridge tuning microelectromechanical system structure. The use of such a tuning structure allows for better wavelength tuning repeatability and wider tuning range as compared to cantilever-based tunable VCSELs. The devices show tuning ranges over 22 nm with peak output power of 1.3 mW in continuous-wave operation at 15/spl deg/C. The bridge structure has a mechanical resonant frequency of 80 kHz. The transmission test through 300-km single-mode fiber (SMF-28) using the tunable VCSEL under mechanical vibration below 10 KHz and 10-G acceleration shows little bit-error-rate degradation.