Abstract

Technological advancements across various sectors are driving a growing demand for large-scale three-degree-of-freedom micro-nano positioning platforms, with substantial pressure to reduce footprints while enhancing motion range and accuracy. This study proposes a three-prismatic-revolute-revolute (3-PRR) parallel mechanism based on biomimetic variable-diameter helical flexible hinges. The resulting platform achieves high-precision planar motion along the X- and Y-axes, a centimeter-level translation range, and a rotational range of 35° around the Z-axis by integrating six variable-diameter flexible helical hinges that serve as rotational joints when actuated by three miniature linear servo drives. The drives are directly connected to the moving platform, thereby enhancing the compactness of the system. A kinematic model of the motion platform was established, and the accuracy and effectiveness of the forward and inverse kinematic solutions were validated using finite element analysis. Finally, a prototype of the 3-PRR parallel platform was fabricated, and its kinematic performance was experimentally verified visually for improved endpoint displacement detection. The assessment results revealed a maximum displacement error of 9.5% and confirmed that, judging by its favorable workspace-to-footprint ratio, the final system is significantly more compact than those reported in the literature.

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