Abstract
This paper reported a biaxial nanopositioning stage single-driven by piezoelectric motor. The employed piezoelectric motor can perform two different driving modes, namely, AC drive mode to drive in long-stroke and at high-speed and DC scanning mode with the high-resolution of several nanometers, which satisfies the requirements of both long-stroke and nanoresolution. To compensate for the effects of the variable friction force and some unpredictable disturbances, a novel backward error compensation (BEC) positioning control method integrated of the two driving modes and a double closed-loop PID controller system are proposed to obtain a high-accuracy positional motion. The experiment results demonstrate that the nanopositioning stage with large travel range of 300 mm × 300 mm has a fine speed characteristic and resolution is 5 nm. In the experiments of different travels up to 15 mm, calibrated by a commercial laser vibrometer, the positioning accuracy is proved within 55 nm inx-axis and 40 nm iny-axis with standard deviation less than 40 nm inx-axis and 30 nm iny-axis and the final position locking can be limited to 10 nm, meeting the requirements of micromanipulation technology.
Highlights
With the development of advanced manufacturing techniques and precision engineering, which have had the result that machined, manufactured, and measured components are no longer restricted to microscale can be fabricated and measured at submicron and even nanoscale [1,2,3]
The traditional method to realize large stroke cross-scale precision positioning is to utilize coarse and fine combined positioning mechanism [14,15,16]. Regarding this type of positioning mechanism, the piezoelectric transducers (PZT) due to its high-resolution are often adopted as actuators in fine positioning [17, 18], but their stroke is limited to several tens of micrometers only
Using its two kinds of drive modes: AC drive mode with a resolution of 100 nm and maximum speed up to 250 mm/s to drive in long-stroke and at high-speed and DC scanning mode with the high-resolution of several nanometers to provide nanoscale motion, resulting in both long-stroke and high-resolution requirements of a precision positioning stage, is achievable without conventional twolevel drive, which are proved through experiment
Summary
With the development of advanced manufacturing techniques and precision engineering, which have had the result that machined, manufactured, and measured components are no longer restricted to microscale can be fabricated and measured at submicron and even nanoscale [1,2,3]. The traditional method to realize large stroke cross-scale precision positioning is to utilize coarse and fine combined positioning mechanism [14,15,16] Regarding this type of positioning mechanism, the piezoelectric transducers (PZT) due to its high-resolution are often adopted as actuators in fine positioning [17, 18], but their stroke is limited to several tens of micrometers only. They are generally combined with an additional long-stroke stage (coarse positioning stage) driven by step motor or the voice coil motor, in order to accomplish high-resolution and long-stroke properties [19, 20]. Using its two kinds of drive modes: AC drive mode with a resolution of 100 nm and maximum speed up to 250 mm/s to drive in long-stroke and at high-speed and DC scanning mode with the high-resolution of several nanometers to provide nanoscale motion, resulting in both long-stroke and high-resolution requirements of a precision positioning stage, is achievable without conventional twolevel drive, which are proved through experiment
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