Abstract
A planar amperometric oxygen sensor has been developed using a printing method for an Ag anode and a four-layered structure for an electrolyte solution. The sensor consists of four glass substrates stuck together by epoxy resin. A Pt cathode and an Ag anode are deposited on one of these glass substrates by r.f. sputtering and by printing, respectively. An internal electrolyte solution is enclosed in the structure and sealed off by an oxygen-permeable membrane. A linear relationship is obtained between the reduction current and the partial pressure of oxygen in the range 0–600 mmHg. The current at an oxygen pressure of 100 mmHg is stable for more than 2000 h. The amount of Ag anode patterned by the printing method is found to be sufficient for continuous long-term use. Based on methods and structures similar to those described in this paper, it should be possible to fabricate miniaturized oxygen sensors and biosensors.
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