Logic-memory device of a mechanical resonator

Abstract

We report multifunctional operation based on the nonlinear dynamics in a single microelectromechanical system (MEMS) resonator. This letter focuses on a logic-memory device that uses a closed loop control and a nonlinear MEMS resonator in which multiple states coexist. To obtain both logic and memory operations in a MEMS resonator, we examine the nonlinear dynamics with and without control input. Based on both experiments and numerical simulations, we develop a device that combines an OR gate and memory functions in a single MEMS resonator.