Abstract

Low temperature cofired ceramic (LTCC) is a multilayer 3D packaging, interconnection, and integration technology. One of the advantages of LTCC is the ability it affords to integrate passive components via the cofiring processes. For LTCC modules with embedded resonator functions targeting high frequency applications, the temperature coefficient of resonant frequency (τf) is a critical parameter. The base dielectrics of commercial LTCC systems have a τf in the range −50 ∼ −80 ppm/°C. This study explores a method to achieve zero or near zero τf embedded resonators by incorporating τf compensating materials locally into a multilayer LTCC structure. Chemical interactions and physical compatibility between the τf modifiers and the host LTCC dielectrics are investigated. A stripline (SL) ring resonator with near zero τf is demonstrated in a non-zero τf commercial LTCC.

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