Localized Grounding, Excavation, and Dissection Using In‐Situ Probe Techniques for Focused Ion Beam and Scanning Electron Microscopy: Experiments With Rock Varnish

Abstract

While investigating rock varnish, we explored novel uses for an in-situ micromanipulator, including charge collection, sample manipulation, as well as digging and dissection at the micron level. Dual-beam focused ion beam microscopes (DB-FIB or FIBSEM) equipped with micromanipulators have proven to be valuable tools for material science, semiconductor research, and product failure analysis. Researchers in many other disciplines utilize the DB-FIB and micromanipulator for site-specific transmission electron microscope (TEM) foil preparation. We have demonstrated additional applications for in-situ micromanipulators.