Abstract
In this paper, the local structure of silicon-containing diamond-like carbon (Si-DLC) films is discussed based on the measurement of C K-edge and Si K-edge near-edge x-ray absorption fine structure (NEXAFS) spectra using the synchrotron radiation of 11 types of Si-DLC film fabricated with various synthesis methods and having different elemental compositions. In the C K-edge NEXAFS spectra of the Si-DLC films, the σ* band shrunk and shifted to the lower-energy side, and the π* peak broadened with an increase in the Si content in the Si-DLC films. However, there were no significant changes observed in the Si K-edge NEXAFS spectra with an increase in the Si content. These results indicate that Si–Si bonding is not formed with precedence in Si-DLC film.
Highlights
Diamond-like carbon (DLC) film is amorphous carbon (a-C) film, which has a disordered form ofC consisting of sp2 and sp3 hybridized bonds [1,2]
K-edge near-edge x-ray absorption fine structure (NEXAFS) spectrum of the silicon-containing DLC (Si-DLC) film that had the highest content of Si, along with those of diamond powder, HOPG, β-SiC powder, and a typical commercial DLC film that was deposited on a 200 nm-thick Si wafer by using the ion plating method
285.38 eV in the C K-edge NEXAFS spectra of HOPG is ascribed to the C1s→π* resonance transition originating from the C=C bonds [36]
Summary
Diamond-like carbon (DLC) film is amorphous carbon (a-C) film, which has a disordered form ofC consisting of sp and sp hybridized bonds [1,2]. DLC films are widely used as coating materials in various industrial fields due to their superior properties, such as their high hardness, low friction coefficient, chemical inertness, and gas barrier [3,4,5]. Hetero-atom-containing DLC films were developed because the existence of hetero-atoms in DLC film has the potential to improve the film properties. The incorporation of Si into DLC films has resulted in an increase in thermal stability [6,7] and resistance to oxidation [8,9], and a decrease in friction in a humid atmosphere [10,11,12]. Silicon-containing DLC (Si-DLC) films have attracted an increasing amount of attention in various industrial fields due to these properties [15,16,17,18]
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