Abstract

The breakthrough of diffraction limit in optical measurement and processing is always an important area. In near-field optics, the resolution is not limited by the diffraction limit, it can achieve ultra-high resolution imaging and surface nanostructure processing, and has important applications in various fields. For the near-field measurement and processing, the local field enhancement effect at the tip is the major factor affecting the spatial resolution. In this paper, the influence factors of the local field enhancement effect of the gold-coated nanoprobe are investigated by using finite difference time domain method, and the effects of incident light source wavelength, incident angle, tip-substrate distance and gold film thickness on the local field enhancement effect are analyzed, so as to provide theoretical guidance for improving the spatial resolution and field enhancement of near-field measurement and processing.

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