Local electrophoretic deposition using a nanopipette for micropillar fabrication

Abstract

A novel and simple technique was developed for the fabrication of micropillars using a nanopipette that is a tapered glass capillary with a micrometer-sized aperture at the tip. The nanopipette was filled with a colloidal solution that included metal nanoparticles. Its tip was put in contact with a substrate, and the substrate was moved downward for continuous deposition of the metal colloidal solution to form micropillars. To improve fabrication reproducibility, the amount of Au colloidal solution deposited was controlled by a feedback loop that maintained a predefined constant current during electrophoretic deposition. The stiffness of the fabricated micropillars was evaluated by applying a loading force using a microcantilever under scanning electron microscopy. The Young’s modulus of the fabricated pillars was measured to be in the range of 7.7–14.8 GPa, depending on the fabrication parameters of the predefined current and fabrication speed.