Abstract
For dielectric constant measurement of areas smaller than the wavelength, this paper proposes a method of employing waveguide-type microscopic aperture probe. The probe is made of WR-15 waveguide with one end shielded with metal plate of 0.3mm, on which a 0.5mm-dia or a 0.1mm-dia aperture is made. The dielectric constant is derived from the slope of phase difference swept over 50-70GHz between the cases of free-space transmission with and without the dielectrics. In order to evaluate the system, the dielectric constant of Teflon has been measured by three cases of using the probes of 0.5mm-dia and 0.1mm-dia, and two V-band corrugated horns. The results show good agreement.
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