Abstract
This work focuses on the comparison of Ln-Ni-O coatings (Ln = La, Nd, Pr) deposited by reactive magnetron sputtering using Plasma Emission Monitoring (PEM) which allows high deposition rate. Each layer is deposited by different steps. The optimal regulation setpoint for oxide rare-earth deposition is determined and then the current dissipated on the nickel target is adjusted to obtain the convenient Ln/Ni ratio and to achieve the K2NiF4 structure. After an appropriate annealing treatment, all coatings exhibit crystalline structures, which depend on the Ln/Ni ratio. Due to the instability of Pr2NiO4 structure at intermediate temperatures, the crystallization step of praseodymium nickelate is performed at higher temperature than the other materials. This further thermal treatment implies a more porous structure. Each coating exhibits interesting properties. Electrical and electrochemical characterizations performed on these deposits prove better properties of the praseodymium nickelate coating.
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