Abstract
This paper reports on aluminum nitride (AlN) cross-sectional Lamé mode resonators (CLMRs) showing high electromechanical coupling coefficient () in excess of 4% in a lithographically defined 307 MHz frequency range around 920 MHz. In addition, we report the performance of a CLMR showing a figure of merit (FoM, defined as the product of quality factor, Q, and ) in excess of 85. To the best of the authors’ knowledge, such FoM value is the highest reported for AlN resonators using interdigitated metal electrodes (IDTs).
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