Abstract
Abstract A low-viscous liquid polycarbosilane (LPCS) is being proposed as a silicon carbide (SiC) precursor for chemical liquid vapour deposition (CLVD) process. The LPCS was characterized by Gel permeation chromatography (GPC), Fourier transformation infrared (FT-IR) spectroscopy, Nuclear magnetic resonance (NMR) spectroscopy, GC-MS and Thermogravimetric analysis (TGA). Spectroscopic investigations together with Gas chromatography Mass spectrum (GC-MS) indicated that the synthesized LPCS is a mixture of cyclic/linear silanes and carbosilanes. TGA showed the complete evaporation of the LPCS below 250 °C, a suitable property for application as a CLVD precursor. Ceramic conversion of LPCS at different temperatures (900 °C, 1100 °C and 1300 °C) under argon, indicated the formation of nano-sized crystallites of β-SiC at 1300 °C.
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