Abstract
Abstract SiGe films were grown on a chemical vapor deposition (CVD)-grown Si0.88Ge0.12/Si (0 0 1) graded film with different growth solution compositions using a temperature interval of 950-940 °C by liquid phase epitaxy (LPE). The LPE films grown on the CVD-grown SiGe/Si (0 0 1) graded film are ≥86% relaxed, much more relaxed than those on bare Si (Wang and Quitoriano, 2019) since the existing threading dislocations in the CVD-grown SiGe/Si (0 0 1) graded film glide to create misfit dislocations without needing to nucleate new ones. The threading dislocation density of the LPE films is slightly lower than that of the CVD-grown SiGe films and on the same order of magnitude, ~106 cm−2. Since the CVD-grown SiGe/Si (0 0 1) graded film was annealed for 4 h before the LPE growth occurred, the properties of the CVD-grown SiGe/Si (0 0 1) graded film were studied and we found that the CVD-grown SiGe/Si (0 0 1) graded film have SiGe islands appear all over the surface aligned along the 〈1 1 0〉 crosshatch morphology and become more relaxed after annealing.
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