Abstract
We report a systematical study on the liquid assisted femtosecond laser machining of quartz plate in water and under different etching solutions. The ablation features in liquid showed a better structuring quality and improved resolution with 1/3~1/2 smaller features as compared with those made in air. It has been demonstrated that laser induced periodic structures are present to a lesser extent when laser processed in water solutions. The redistribution of oxygen revealed a strong surface modification, which is related to the etching selectivity of laser irradiated regions. Laser ablation in KOH and HF solution showed very different morphology, which relates to the evolution of laser induced plasma on the formation of micro/nano-features in liquid. This work extends laser precision fabrication of hard materials. The mechanism of strong absorption in the regions with permittivity (epsilon) near zero is discussed.
Highlights
Femtosecond laser has proved to be an efficient tool for micro/nanomachining [1] in micro-optics [2], micromechanics [3], microfluidics [4], organic light-emitting diode (OLED) display [5], and micro-sensing [6]
By intense laser pulses focused with an objective lens, structures and patterns of 2D and 3D morphology have been realized [2,8]
The laser–matter interaction at the surface is inevitably affected by the evolving ablation pattern of the fabricated structure due to the scattering and absorption, chemical modification [11]
Summary
Femtosecond (fs) laser has proved to be an efficient tool for micro/nanomachining [1] in micro-optics [2], micromechanics [3], microfluidics [4], organic light-emitting diode (OLED) display [5], and micro-sensing [6]. The laser–matter interaction at the surface is inevitably affected by the evolving ablation pattern of the fabricated structure due to the scattering and absorption, chemical modification [11]. The morphology of the holes fabricated with different laser pulse energies and pulse numbers wweerreeiinnvveesstitgigaateteddafatfetrerfafbarbirciactaiotinoninianiraairndanddeidoeniioznedizewdatwera.tAers.
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