Abstract
The linewidth of a direct laser writer is limited by the Rayleigh criteria. We propose a new direct laser writer that can overcome this limitation by employing the interference phenomenon. An interference generator is introduced into our system to separate an input beam into two orthogonally polarized beams. After going through an exposure lens, these two beams meet again on the focal point, and generate a small interferogram that sharpens the shape of the focused beam spot.
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