Abstract

Herein, the method of spectrum-encoded dual-comb interferometry is introduced to measure a three-dimensional (3-D) profile with absolute distance information. By combining spectral encoding for wavelength-to-space mapping, dual-comb interferometry for decoding and optical reference for calibration, this system can obtain a 3-D profile of an object at a stand-off distance of 114mm with a depth precision of 12μm. With the help of the reference arm, the absolute distance, reflectivity distribution, and depth information are simultaneously measured at a 5kHz line-scan rate with free-running carrier-envelope offset frequencies. To verify the concept, experiments are conducted with multiple objects, including a resolution test chart, a three-stair structure, and a designed "ECNU" letter chain. The results show a horizontal resolution of ∼22 μm and a measurement range of 1.93mm.

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